Discuss a basic characteristic and common application of technologies that have been widely used in various high -performance electronic equipment. "MEMS" -it is both a name and a concise definition.

So what does MEMS mean?
MEMS refers to technologies that allow mechanical structural miniaturization and fully integrated with the circuit, which is actually more like the system that "system" means that mechanical components and electronic components work together to achieve the required functions. Therefore, it is a miniature (very small) electrical and mechanical system.

Mechanical to Electrical to (micro) machinery
Mechanical components and systems are usually considered as advanced as the main solution technology based on electrical phenomena, but this does not mean that mechanical methods are generally poor. For example, mechanical relays provide similar functions than equipment based on transistors, but mechanical relays are still widely used.

However, compared with electronic components in integrated circuits, typical mechanical devices always have a large disadvantage. The spatial limit of a given application may be favored or needed by electronic components, even if mechanical implementation can lead to simpler or higher performance design.

MEMS technology represents a direct solution to solve the concept of this dilemma: If we modify the machinery and equipment, not only are they very small, but also completely compatible with the integrated circuit manufacturing process, we can "all the beauty" to a certain extent.

This is a physical gear and chain. The movement and function of this machine is like the movement and function of the gear and chain. However, there are about 50 meters long in the chain -that is, less than a diameter of a hair.

What is MEMS?
In the previous section, I said that MEMS technology is a conceptual solution. As you expected, the idea of putting forward a micro -mechanical device is much easier than actual manufacturing.

We use the verb "processing" to describe the work of processing a piece of metal into mechanical parts such as gears or pulleys. In the field of MEMS, an equivalent term is that the micro -mechanical structure in the MEMS device "micro -machine" MEMS device is made by using the use of my almost unknown professional technology to the physical modification of silicon (or another substrate material) Essence These silicon mechanical structures were subsequently combined with silicon integrated circuits, and the resulting mechanical and electrical systems were packaged in packaging and sold them as a single device.

The papers of MEMS as described by the MEMS are used by the MEMS device released by the University of Lafborg University, using micro -mechanical structures, sensors and actors. The sensor allows MEMS to detect heat, mechanical, magnetic, electromagnetic, or chemical changes. These changes can be converted into available data through electronic circuits, while the actuator produces physical changes, not just measure these changes.

Example of MEMS device

Let's see the function and internal structure of a MEMS device.

The graphic conveys the physical structure of micro -machining cantilever switch beams. There are four switching beams, and each switch beam has five contacts (using multiple contacts is a technology that reduce the transmission resistance). The switching beam is driven by voltage applied.

Here we see the MEMS switch (right) and related drive circuits (left), which are connected to each other and packaged in QFN packaging. The driver circuit allows typical digital devices (such as microcontrollers) to effectively control the switch because it does all necessary things to generate slope high -voltage driving signals to promote effective and reliable switch operations.

MEMS application: When does MEMS device use?
MEMS technology can be combined into a variety of electronic components. Companies that manufacture these components may claim that MEMS's realization is better than any product used before the MEMS version. It is difficult to fully verify these claims to prove that the general statement of "MEMS device provides better performance than non -MEMS devices" is correct. However, my overall impression is that in many cases, MEMS is indeed a major progress. If performance or easy implementation is a priority in your design, I will first consider MEMS devices.

In the field of electrical engineering, MEMS technology has been included in four product categories:
Sounding
In the field of audio, we have MEMS microphone and MEMS speakers.

sensor
Sensor is the main application of MEMS technology; there are MEMS gyroscope, inclination instrument, acceleration meter, flow sensor gas sensor, pressure sensor and magnetic field sensor.

switch
In my opinion, the electrical control switch is a particularly interesting application of MEMS technology. The article I mentioned in the ADGM1004 is easy to control. The signal frequency range is from 0 Hz to 10 GHz. The leakage current in the shutdown state is less than 1 NA, and it provides a driver life of at least 1 billion cycles.

Oscillator
The combination of micro -mechanical resonator with incentive circuits and maintenance circuits produces a MEMS oscillator.

in conclusion
Many electronic devices use MEMS technology. If it is not designed a circuit board every time, you will encounter MEMS components sooner or later. I hope this article is well outlined what MEMS and how it is used for electronic design.

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